Identification and evaluation of the characteristics of a selected commercial mems based vibration sensor for the machine condition monitoring
More details
Hide details
Silesian University of Technology
Submission date: 2023-05-08
Final revision date: 2023-07-23
Acceptance date: 2023-09-20
Online publication date: 2023-09-27
Publication date: 2023-09-27
Corresponding author
Damian Augustyn   

Silesian University of Technology
With the emergence of the Industry 4.0 concept, machine vibration monitoring and diagnostics systems based on the so-called smart vibration sensors using MEMS accelerometers become very popular on the market. Many automation companies use specifically designed for CbM industrial vibration sensors based on electronic chips with enclosed MEMS accelerometers. However, in the commercial vibration sensors datasheets very often are not provided detailed metrological parameters like frequency response in the declared frequency band. The article presents the results of research concerned to identification of frequency response of an exemplary available on market digital accelerometer dedicated to machines condition monitoring. The determined characteristics indicate that the sensor can be used for basic diagnostics of machines in accordance to the series of vibration standards ISO 10816 and ISO 20816. On the basis of the determined characteristics, it can be concluded that there are some non-linarites of the frequency response functions at the boundaries of the declared measurement band. It shows that application of that sensor to precise measurements conducted during scientific research could be limited.
Albarbar A, Badri A, Sinha JK, Starr A. Performance evaluation of MEMS accelerometers. Measurement 2009;42(5):790-5.
Albarbar A, Mekid S, Starr A, Pietruszkiewicz R. Suitability of MEMS Accelerometers for Condition Monitoring: An experimental study. Sensors 2008;8(2):784-99.
Arumugam M, Balachander S, Pandiyan J, Ramaswamy S, Umapathy M. Low cost vibration measuring device using MEMS accelerometer. TechConnect Briefs; (3): 349-52.
Chaudhury SB, Sengupta M, Mukherjee K. Vibration monitoring of rotating machines using MEMS accelerometer. International Journal of Scientific Engineering and Research 2014;2(9).
Evanczuk S. Build a MEMS vibration sensor system for condition-based monitoring in industrial applications. Digi-Key Electronics 2019.
Fidali M. Metody diagnostyki maszyn i urządzeń w predykcyjnym utrzymaniu ruchu. Elamed Media Group 2020.
Huang CY, Chen JH. Development of dual-axis MEMS accelerometers for machine tools vibration monitoring. Applied Science 2016; 6(7): 201.
Looney M. An introduction to MEMS vibration monitoring. Analog Dialogue 2014; 48.
Looney M. MEMS vibration monitoring: from acceleration to velocity. Fierce Electronics 2018.
Mohd-Yasin F, Nagel DJ. Noise as diagnostic tool for quality and reliability of MEMS. Sensors 2021; (21).
Murphy C. Choosing the most suitable predictive maintenance sensor. Analog Devices 2020.
Murphy C. Why MEMS accelerometers are becoming the designer’s best choice for CbM applications. Analog Devices 2021.
Niu W, Fang L, Xu L, Li X, Huo R, Guo D, Qi Z. Summary of research status and application of MEMS accelerometers. Journal of Computer and Communications. 2018; 06(12): 215-21.
PCB 301A10 Calibration Accelerometer Sensor. PCB Piezotronics. Available from:
Rebello J. Design and analysis of a MEMS vibration sensor for automotive mechanical systems. 2002.
Son JD, Niu G, Yang BS, Hwang DH, Kang DS. Development of smart sensors system for machine fault diagnosis. Expert Systems With Applications. 2009; 36(9): 11981-11991.
Staszewski W, Jablonski A, Dziedziech K, Barszcz T. Modelling and testing of MEMS based vibration sensor for rolling element bearing fault detection. In Diagnostyka Maszyn: XLVII Ogólnopolskie Sympozjum Wisła 1.03-5.03 2020. Streszczenia 2020.
Vibration accelerometers. PCB Piezotronics 2020.